Influence of calcination temperature on structural and optical properties of TiO2-SiO2 thin films prepared by sol-gel dip coating

We prepared TiO₂-SiO₂ thin films with various TiO₂/SiO₂ ratios by sol-gel dip coating method and explored the dependence of their structural and optical properties on calcination temperature. The absorption peaks relevant to Si—O, Si—O—Ti and Ti—O bonds appeared in the FTIR spectra. With increasing TiO₂ content, the intensity of Si—O bond peaks decreases and that of Ti—O bond peaks increases. The XRD results show that the temperature of transformation from amorphous to anatase phase is lowered as TiO₂ content increases. The crystallite size of anatase phase in composite thin films increases with increasing TiO₂ content and calcination temperature. At 1000°C, the mixed phase of anatase and rutile appears in the pure TiO₂ thin films. The rutile films are denser than the anatase films. The increase in refractive index of composite thin films with calcination temperature is related to the decreased thickness and increased density as a result of evaporation of water and organic matters below 400°C. On the other hand, it is related to the change in the crystal phase and crystallite size of the films over 400°C.