| 凹凸结构纳米多孔氧化硅的制备 |
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| 引用本文： | 蔡勇 孙志刚 H．Akinaga 余海湖 顾尔丹 李咪.凹凸结构纳米多孔氧化硅的制备[J].功能材料,2007,38(A06):2155-2157. |
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| 作者姓名： | 蔡勇 孙志刚 H．Akinaga 余海湖 顾尔丹 李咪 |
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| 作者单位： | [1]武汉理工大学材料复合新技术国家重点实验室,湖北武汉430070 [2]日本产业综合研究所纳米研究部门,日本筑波 |
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| 基金项目： | 基金项目：教育部新世纪优秀人才计划资助项目（NCET-05-0659） |
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| 摘 要： | 采用金属辅助化学反应刻蚀法制备了具有凹凸结构的纳米多孔氧化硅，利用光学显微镜、原子力显微镜、扫描电子显微镜和透射电子显微镜等，研究了刻蚀时间对纳米多孔氧化硅形貌结构的影响。结果表明：刻蚀初期在强氧化性酸的作用下，硅表面形成一层氧化硅薄膜，进一步刻蚀，氧化硅薄膜出现规则的周期性凹凸结构裂纹。最后展望了这种凹凸结构纳米多孔氧化硅的应用前景。
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| 关 键 词： | 制备 凹凸结构 多孔氧化硅 裂纹 |
| 文章编号： | 1001-9731（2007）增刊-2155-03 |
| 修稿时间： | 2007-05-06 |
Preparation of nanoscale porous silica with convex-concave structure |
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| CAI Yong, SUN Zhi-gang, H.Akinaga, YU Hai-hu, GU Er-dan, LI Mi.Preparation of nanoscale porous silica with convex-concave structure[J].Journal of Functional Materials,2007,38(A06):2155-2157. |
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| Authors: | CAI Yong SUN Zhi-gang HAkinaga YU Hai-hu GU Er-dan LI Mi |
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| Abstract: | Nanoscale porous silica was prepared by using metal assistance chemical reaction etching method. Several research measures were used to investigate the morphologies and structure of porous silica,such as optical microscope, atomic force microscope, scanning electron microscrope. The result showed that silica film was formed on the surface of Si wafe in the initial stage. With etching time elapsing, periodical silica film with convex-concave structure was formed and the possible reason was proposed. At last, perspective of porous silica with convex-concave structure was prospected. |
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| Keywords: | preparation convex-concavestructure porous silica crack |
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