| 微米／纳米加工中的聚焦离子束技术 |
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| 引用本文： | 钱海霞. 微米／纳米加工中的聚焦离子束技术[J]. 广东化工, 2009, 36(7): 84-86 |
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| 作者姓名： | 钱海霞 |
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| 作者单位： | 深圳大学,材料科学与工程系,深圳市特种功能材料重点实验室,广东,深圳,518060 |
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| 摘 要： | 聚焦离子束系统正成为微细加工领域的有力工具。文章简述了聚焦离子束系统的组成和工作原理，着重介绍了该系统在离子束刻蚀、离子束辅动沉积和离子注入等微米／纳米加工领域的应用，并对聚焦离予束技术的特点及未来的发展前景进行了总结和分析。
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| 关 键 词： | 聚焦离子束 刻蚀 沉积 离子注入 微米/纳米加工 |
Micro-/Nano-Fabrication Using Focused Ion Beam Technology |
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| Qian Haixia. Micro-/Nano-Fabrication Using Focused Ion Beam Technology[J]. Guangdong Chemical Industry, 2009, 36(7): 84-86 |
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| Authors: | Qian Haixia |
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| Affiliation: | Qian Haixia (Shenzhen Key Laboratory of Special Functional Materials,Department of Materials Science and Engineering,Shenzhen University,Shenzhen 518060,China) |
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| Abstract: | Focused ion beam (FIB) technology has become increasingly popular tool for the fabrication of very small structures. In the review, the FIB system and its interaction with solid surface was introduced first. The FIB technology was examined with emphasis on its ability to carry out ion milling, ion-assisted deposition and ion implantation. Finally, concluding remarks were provided where the strength and weakness of the techniques studied were summarized and the scopes for technological improvement and future... |
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| Keywords: | foeused ionbeam milling ion-assisteddeposition ion implantation micro-/nano-fabrication |
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