| 去离子水中N型硅的微细电火花加工工艺实验 |
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| 引用本文： | 王再成,曹国辉,王振龙,赵万生. 去离子水中N型硅的微细电火花加工工艺实验[J]. 电加工与模具, 2005, 0(5): 5-8 |
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| 作者姓名： | 王再成 曹国辉 王振龙 赵万生 |
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| 作者单位： | 1. 哈尔滨工业大学机电工程学院,黑龙江哈尔滨,150001
2. 上海交通大学机械与动力工程学院,上海,200030 |
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| 摘 要： | 对去离子水中N型硅的微细电火花加工工艺进行了实验研究,分别在加工效率、电极损耗、表面粗糙度等方面与煤油工作液中N型硅的加工进行了对比.通过大量的实验研究得出：在相同的电参数下,与煤油工作液中加工实验相比,以去离子水为工作液介质时微细电火花加工N型硅的加工效率更高,其工件表面粗糙度值基本相当,且其放电加工过程非常稳定,可知微细电火花加工N型硅时,去离子水是一种较好的工作液介质.
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| 关 键 词： | 微细电火花加工 N型硅 去离子水 |
| 修稿时间： | 2005-04-21 |
Experimental on Micro-EDM of N-doped Silicon in Demonized Water |
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| Wang Zaicheng,Cao Guohui,Wang Zhenlong,Zhao Wansheng. Experimental on Micro-EDM of N-doped Silicon in Demonized Water[J]. Electromachining & Mould, 2005, 0(5): 5-8 |
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| Authors: | Wang Zaicheng Cao Guohui Wang Zhenlong Zhao Wansheng |
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| Abstract: | The experiments of n-doped silicon micro-EDM in demonized water have been carried out.The maching speed,the wear of the electrode roughness in demonized water are compared with those in kerosene.The experimental results show that the maching speed of n-doped silicon micro-EDM in demonized water is higher than in kerosene,and the wear of the electrode is also higher,and roughness is almost the same.Demonized water is a kind of better dielectric fluid. |
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| Keywords: | micro-EDM n-doped silicon demonized water |
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