| SPC技术在高纯四氟化硅生产中的应用 |
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| 引用本文： | 李丹丹,李翔宇,郑秋艳,张净普,孙秋丽. SPC技术在高纯四氟化硅生产中的应用[J]. 化学工程师, 2014, 0(1): 15-17,28 |
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| 作者姓名： | 李丹丹 李翔宇 郑秋艳 张净普 孙秋丽 |
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| 作者单位： | 中国船舶重工集团公司第七一八研究所,河北邯郸056027 |
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| 摘 要： | 本文以高纯SiF4生产过程中精馏后的HF含量作为质量管理的对象,论述SPC技术在SiF4生产质量控制中的初步应用。
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| 关 键 词： | SPC 四氟化硅 控制图 过程能力指数 |
Application of SPC technology in high-purity silicon tetrafluoride production |
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| LI Dan-dan,LI Xiang-yu,ZHENG Qiu-yan,ZHANG Jing-pu,SUN Qiu-li. Application of SPC technology in high-purity silicon tetrafluoride production[J]. Chemical Engineer, 2014, 0(1): 15-17,28 |
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| Authors: | LI Dan-dan LI Xiang-yu ZHENG Qiu-yan ZHANG Jing-pu SUN Qiu-li |
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| Affiliation: | (The 718 Research Institute of China Shipbuilding Industry Corporation, Handan 056027,China) |
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| Abstract: | In this paper, hydrogen fluoride content of high-purity silicon tetrafluoride production after distilla- tion was as quality management objects, was discussed preliminary application of quality control of THe SPC（sta- tistical process control） technology in the production of silicon tetrafluoride. |
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| Keywords: | SPC silicon tetrafluoride control charts process capability indices |
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