| MEMS仿生矢量水听器优化设计 |
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| 引用本文： | 刘林仙,张国军,张文栋. MEMS仿生矢量水听器优化设计[J]. 纳米技术与精密工程, 2013, 0(2): 159-163 |
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| 作者姓名： | 刘林仙 张国军 张文栋 |
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| 作者单位： | [1]中北大学仪器科学与动态测试教育部重点实验室,太原030051 [2]中北大学电子测试技术国家重点实验室,太原030051 |
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| 基金项目： | 基金项目：国家高技术研究发展计划（863计划）资助项目（2011AA040404）;中北大学研究生科技基金资助项目（20120923）. |
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| 摘 要： | 针对纤毛式MEMS仿生单矢量水听器灵敏度偏低、频响曲线起伏较大的缺陷,对该结构水听器进行了优化设计.通过理论分析和仿真计算,从两方面进行了优化,一是纤毛材料的选择,选用光纤替代塑料柱体;二是设计了一种"半油半酯"新型封装结构.最后在国防水声一级计量站对该封装水听器进行了相应的校准测试.测试结果表明,该水听器性能较之前有了明显提高,灵敏度达到-165 dB(包括前置放大26 dB),频响范围为20 Hz～2 kHz(±4 dB),具有良好的"8"字型指向性.
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| 关 键 词： | 矢量水听器 MEMS 纤毛 光纤 半油半酯 |
Optimization Design of MEMS Bionic Vector Hydrophone |
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| Liu Linxian,Zhang Guojun,Zhang Wendong. Optimization Design of MEMS Bionic Vector Hydrophone[J]. Nanotechnology and Precision Engineering, 2013, 0(2): 159-163 |
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| Authors: | Liu Linxian Zhang Guojun Zhang Wendong |
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| Affiliation: | 1. Key Laboratory of Instrumentation Science ＆ Dynamic Measurement of Ministry of Education, North University of China, Taiyuan 030051, China ; 2. National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan 030051, China |
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| Abstract: | The MEMS bionic hair cell single vector hydrophone has the disadvantages of low sensitivity and obvious frequency response fluctuation. On the basis of theoretical analysis and simulation calcula- tion, the hydrophone was optimized in this paper. The plastic cylinder was replaced by optical fiber as the material of cilia and a novel ＂half oil and half polyurethane＂ package structure was proposed. The hydrophone calibration was finished in National Defense Underwater Acoustics Calibration Laboratory of China. Results show that the performance of the hydrophone was greatly improved compared with that of the previous, with a sensitivity of -165 dB （including pre-amplification 26 dB）, a frequency response range of 20 Hz--2 kHz（±4 dB）,and a good directional pattern in the form of ＂8＂-shape. |
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| Keywords: | vector hydrophone MEMS cilia optical fiber half oil and half polyurethane |
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