Thin-film sensor based tip-shaped split ring resonator metamaterial for microwave application

The artificially constructed materials based split ring resonators (SRRs) may have exotic electromagnetic properties and have received growing interest in recent years. Moreover, the resonance frequency shift of this material is extraordinarily sensitive to the changes in the capacitance of SRR, which makes SRR suit for microwave thin-film sensing applications. Based on such principle, the tip-shaped SRR metamaterial is presented as thin-film sensor in this paper to reduce device size and resonance frequency as well as to improve the Q-factor. The structure is placed inside an X-band waveguide with dimensions of 22.86 mm × 10.16 mm × 12.8 mm to investigate resonance frequency shift in different cases by numerical method. In contrast to the traditional structures, the tip-shaped design exhibits a miniaturization and sharper dip on resonance in their transmission spectra. Furthermore, the proposed sensor can deliver the sensitivity level of 16.2 MHz/μm and less than a 2 μm nonlinearity error when the uniform benezocyclobutene films from 100 nm to 50 μm thick are coated onto the fixed structure. These results indicate that the proposed thin-film sensor has high sensitivity and low nonlinearity error, and make it great promising application for wireless sensors in future.