| 前驱体加热温度对Pt-Ir合金薄膜的成分与沉积速率的影响 |
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| 引用本文： | 陈力,胡昌义,蔡宏中,王云. 前驱体加热温度对Pt-Ir合金薄膜的成分与沉积速率的影响[J]. 贵金属, 2010, 31(1) |
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| 作者姓名： | 陈力 胡昌义 蔡宏中 王云 |
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| 作者单位： | 1. 昆明理工大学,材料与冶金工程学院,云南,昆明,650093;昆明贵金属研究所,云南贵金属材料重点实验室,云南,昆明,650106
2. 昆明贵金属研究所,云南贵金属材料重点实验室,云南,昆明,650106 |
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| 基金项目： | 云南省自然科学基金资助项目 |
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| 摘 要： | 以乙酰丙酮铱和乙酰丙酮铂为前驱体,采用金属有机化合物化学气相沉积(MOCVD)技术在钼基体上沉积了PtIr薄膜。研究了前驱体加热温度对PtIr薄膜结构、成分和沉积速率的影响。结果表明,MOCVD的PtIr薄膜为合金膜,Pt-Ir合金薄膜成分、沉积速率随前躯体加热温度变化而变化,并存在极值点。
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| 关 键 词： | 复合材料 金属有机物化学气相沉积 Pt-Ir合金膜 成分 沉积速率 |
Influence of Heating-up Temperature of Precursors on Composition and Deposition Rate of Pt-Ir Alloy Films |
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| CHEN Li,HU Changyi,CAI Hongzhong,WANG Yun. Influence of Heating-up Temperature of Precursors on Composition and Deposition Rate of Pt-Ir Alloy Films[J]. Precious Metals, 2010, 31(1) |
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| Authors: | CHEN Li HU Changyi CAI Hongzhong WANG Yun |
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| Abstract: | PtIr films were prepared by metal-organic chemical vapor deposition (MOCVD) on molybdenium substrates using acetylacetonate as the precursor. The effects of the heating temperature of the precursors on the microstructure, composition and the deposition rate of Pt-Ir films were studied. The results showed that it was possible to produce Pt-Ir alloy films by MOCVD. The composition and deposition rate varied with the temperature, and there was an extreme point. |
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| Keywords: | composites MOCVD Pt-Ir alloy films composition deposition rate |
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