Helicon Plasma Source |
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| Authors: | Braginskii O V Vasil'eva A N Kovalev A S |
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| Affiliation: | (1) Institute of Nuclear Physics, Moscow State University, Moscow, Russia |
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| Abstract: | A spiral-antenna helicon plasma source is characterized experimentally at applied magnetic flux densities below 60 G and applied RF powers below 800 W. It is shown that, for a given RF power, a magnetostatic field applied to an inductively coupled plasma increases the electron concentration fourfold. |
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