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提高金属材料离子注入效益的一条新途径
引用本文:阚希文. 提高金属材料离子注入效益的一条新途径[J]. 微细加工技术, 1991, 0(4): 26-31
作者姓名:阚希文
作者单位:北京师范大学低能核物理所 100875
摘    要:本文评述了在金属材料领域中应用离子注入技术的现状;阐明了提高离子注入效益的一条新途径:不仅以离子注入技术改变工模具的性能,延长其使用寿命,而且以离子注入技术来显著提高金属产品的质量。文末还对进一步发展离子注入的前景做了展望。

关 键 词:离子注入 金属材料 抗蚀性

A NEW WAY IMPROVING BENEFITS OF ION IMPLANTATION IN METALLIC MATERIALS
Kan Xiwen. A NEW WAY IMPROVING BENEFITS OF ION IMPLANTATION IN METALLIC MATERIALS[J]. Microfabrication Technology, 1991, 0(4): 26-31
Authors:Kan Xiwen
Abstract:The present situations of applying ion implantation technique in metallic materials are reviewed. A new way improving benefits of ion implantation is demonstrated, i.e. not only the properties of tools and dies are improved, and their life-time is extended, but also the qualities of metallic products are significantly improved by ion implantation technique. The prospects of developing ion implantation technique are forecasted in this paper.
Keywords:Ion implantation  Benefits  New way  Metallic materials.
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