聚合物微结构超声压印精密加工系统研究

超声压印技术是一种聚合物微结构成形的新方法。针对微米级超声加工系统的高精度和高可靠性的要求,设计了用于聚合物微结构超声压印的精密加工系统,推导了换能器动力学模型并求解特征参数,进行了有限元仿真与优化,并搭建了基于压力反馈的精密压印测控平台。实验结果与理论分析结果吻合,设计的换能器系统改善了微米级加工中的加工精度、能量控制和可靠性,为快速批量精密压印成形的加工系统提供了设计和优化方法。

Study on Ultrasonic Embossing System for Polymer Microstructure Imprinting

The ultrasonic embossing technology is a kind of new technology for the polymer microstructre fabricating. In view of the high accuracy and high reliability of micro scale ultrasonic machining system, an ultrasonic embossing system for polymer microstructure imprinting has been studied. The dynamic model of the transducer has been derived and the characteristic parameters have been solved. The finite element simulation and optimization of the device have been carried out and the experimental platform based on the force feedback control has been set up. The experimental results agree well with the theoretical model. The proposed transducer system has improved the fabrication accuracy, energy control and reliability of the micro scale machining. This study provides a theoretical method for designing micro scale actuator for ultrasonic embossing, and shows great potential for fast fabrication of polymer microstructures with low cost and energy consumption.