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Inversion of the electron energy distribution in hollow-cathode glow discharge in nitrogen-sulfur hexafluoride gas mixture
Authors:V. Yu. Bazhenov  A. G. Kalyuzhnaya  I. A. Soloshenko  A. F. Tarasenko  A. G. Terent’eva  V. V. Tsiolko  A. I. Shchedrin
Affiliation:(1) Institute of Physics, National Academy of Sciences of Ukraine, Kiev, Ukraine
Abstract:The electron energy distribution function (EDF) in a hollow-cathode glow discharge in nitrogen-sulfur hexafluoride (N2-SF6) gas mixture has been studied by experimental and theoretical methods. On adding a small amount of SF6 to N2, the density of electrons in the energy interval (2−4 eV) of the EDF inversion increases by approximately one order of magnitude.
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