Inversion of the electron energy distribution in hollow-cathode glow discharge in nitrogen-sulfur hexafluoride gas mixture |
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Authors: | V. Yu. Bazhenov A. G. Kalyuzhnaya I. A. Soloshenko A. F. Tarasenko A. G. Terent’eva V. V. Tsiolko A. I. Shchedrin |
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Affiliation: | (1) Institute of Physics, National Academy of Sciences of Ukraine, Kiev, Ukraine |
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Abstract: | The electron energy distribution function (EDF) in a hollow-cathode glow discharge in nitrogen-sulfur hexafluoride (N2-SF6) gas mixture has been studied by experimental and theoretical methods. On adding a small amount of SF6 to N2, the density of electrons in the energy interval (2−4 eV) of the EDF inversion increases by approximately one order of magnitude. |
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