| 俄歇电子能谱的峰形修正与峰形分析 |
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| 引用本文： | 周惠健,何炜. 俄歇电子能谱的峰形修正与峰形分析[J]. 真空科学与技术学报, 1993, 0(6) |
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| 作者姓名： | 周惠健 何炜 |
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| 作者单位： | 清华大学电子工程系，清华大学电子工程系 北京 100084，北京 100084 |
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| 摘 要： | 介绍一系列峰形修正的方法——包括本底的扣除、仪器响应函数的修正、非弹性散射影响的消除等,并将其应用于Si(100)表面的俄歇峰形分析中,对于L_(23)VV,L_1L_(23)V峰取得了与理论计算符合很好的结果,从中可以提取出丰富的价带局域电子态信息。
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| 关 键 词： | 俄歇电子能谱 本底 散射响应函数 快速傅立叶变换 俄歇峰形修正 |
METHODS FOR AUGER LINESHAPE CORRECTION AND ANALYSIS |
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| Zhou Huijina,W. Ho. METHODS FOR AUGER LINESHAPE CORRECTION AND ANALYSIS[J]. JOurnal of Vacuum Science and Technology, 1993, 0(6) |
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| Authors: | Zhou Huijina W. Ho |
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| Abstract: | Methods for the correction of Auger lineshape are presented, including background subtraction, deconvolution by instrumental broadening functions and energy loss function. By applying the above processes to the measured Si(100) L_(23)VV and L_1L_(23)V Auger lineshape, we have obtained a good agreement with theoretical results. It is shown that informations related to the local density of states (LDOS) and chemical states can be acquired by employing Auger lineshape analysis(ALA). |
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| Keywords: | Auger electron spectroscopy Background Scattering response function Fast Fourier transform Auger lineshape correction |
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