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| Fabrication and characterization of rugate structures composed of SiO_2 and Nb_2O_5 | |
| 作者姓名： | R. Leitel O. Stenzel S. Wilbrandt D. G bler V. Janicki N. Kaiser |
| 作者单位： | Institut für Angewandte Physik，Friedrich Schiller University Jena，Max-Wien-Platz 1，07743 Jena，Germany，Optical Coatings Department，Fraunhofer Institut für Angewandte Optik und Feinmechanik，Albert-Einstein-Str. 7，D-07745 Jena，Germany，Optical Coatings Department，Fraunhofer Institut für Angewandte Optik und Feinmechanik，Albert-Einstein-Str. 7，D-07745 Jena，Germany，Institute Ruder Boskovic，Bijenicka 54，10000 Zagreb，Croatia，Optical Coatings Department，Fraunhofer Institut für Angewandte Optik und Feinmechanik，Albert-Einstein-Str. 7，D-07745 Jena，Germany |
| 摘 要： | 1Introduction Opticalcoatingdesignsbasedonlayers,whichareinhomogeneousalongthestackaxis,haveopticalandmechanicalpropertiesthatdiffer fromthoseofconventionalhigh low index stacks.Particularly,thewideaccessibleangular rangeandthelowopticalscatterlevelmake themsuperiortotraditionalstackswithrespect toselectedpurposessuchasomni directionalde vicesornotchfilters14].Manufacturingsuch systemsinpracticerequiresthecalculation,dep osition,monitoringandcharacterizationofopti calcoatingswithawelldefinedc… |
| 关 键 词： | SiO2 Nb2O5 防反射涂层 光学薄膜 光谱分析 光电器件 SLD 剩余模态反射率 超发光二极管 |
| 收稿时间： | 2005-06-06 |
| 修稿时间： | 2005-06-16 |
Fabrication and characterization of rugate structures composed of SiO2 and Nb2O5 |
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| R. Leitel,O. Stenzel,S. Wilbrandt,D. G bler,V. Janicki,N. Kaiser.Fabrication and characterization of rugate structures composed of SiO_2 and Nb_2O_5[J].Optics and Precision Engineering,2005,13(4):505-511. | |
| Authors: | RLeitel OStenzel SWilbrandt DGbler VJanicki NKaiser |
| Affiliation: | 1. Institut für Angewandte Physik,Friedrich Schiller University Jena,Max-Wien-Platz 1,07743 Jena,Germany 2. Optical Coatings Department,Fraunhofer Institut für Angewandte Optik und Feinmechanik,Albert-Einstein-Str.7,D-07745 Jena,Germany 3. Institute Ruder Boskovic,Bijenicka 54,10000 Zagreb,Croatia |
| Abstract: | Gradient index layers and rugate structures were fabricated on a Leybold Syrus pro deposition system by plasma-assisted coevaporation of the low index material silica and the high index material niobium pentoxide. To obtain information about the compositional profiles of the produced layers, cross sectional transmission electron microscopy was used in assistance to deposition rate data recorded by two independent crystal monitors during the film preparation. The depth dependent concentration profiles were transformed to refractive index gradients by means of effective medium approximation. Based on the refractive index gradients the corresponding samples` transmission and reflection spectra could be calculated by utilizing matrix formalism. The relevance of the established refractive index profiles could be verified by comparison of the calculated spectra with the measured ones. |
| Keywords: | physical vapor deposition effective medium approximation rugate structure |
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