| 感应耦合气体放电的理论模型 |
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| 引用本文： | 李培芳,M.T.C.Fang. 感应耦合气体放电的理论模型[J]. 浙江大学学报(工学版), 1991, 0(3) |
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| 作者姓名： | 李培芳 M.T.C.Fang |
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| 作者单位： | 浙江大学电机系(李培芳)，英国利物浦大学电子系(M.T.C.Fang) |
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| 摘 要： | 本文提出了低气压下无极感应耦合气体放电的一维理论模型。放电为磁场激励,稳定的等离子体由交变电磁场所维持,等离子体密度分布和电子温度由折合半径所确定,密度绝对值由电磁功率所确定。文中还讨论了放电系统等效电路的一些性质。
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| 关 键 词： | 气体放电 感应耦合 |
A theoretical model of inductively coupled discharge |
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| Li Peifang. A theoretical model of inductively coupled discharge[J]. Journal of Zhejiang University(Engineering Science), 1991, 0(3) |
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| Authors: | Li Peifang |
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| Abstract: | A self-consistent theoretical model for an inductively coupled, cylindrical discharge at low pressure has teen proposed. The dischareg is assumed to be operated in the H-mode. A steady state plasma has been found to exist maintained by the electromagnetic field. Tne plasma density, profile and electron temperature are uniquely determined by the reduced tube radius,pR.A radial electrostatic field produced by the density difference of positive and negtive charged particles ensures the ambipolar diffusion of charged particles. The power input from the electromagnetic field determines the axis plasma density. The equivalent circuit representation and some useful working charts are also given. |
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| Keywords: | gas discharge inductively coupled |
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