| 视觉系统在硅片检测上的应用 |
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| 引用本文： | 田娜,庞师军,卫晓冲. 视觉系统在硅片检测上的应用[J]. 电子工艺技术, 2010, 31(5) |
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| 作者姓名： | 田娜 庞师军 卫晓冲 |
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| 作者单位： | 中国电子科技集团公司第二研究所,山西,太原,030024;中国电子科技集团公司第二研究所,山西,太原,030024;中国电子科技集团公司第二研究所,山西,太原,030024 |
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| 摘 要： | 机器视觉是利用机器代替人眼来做各种测量和判断.介绍了全自动硅片装片机中利用视觉系统对硅片的边缘进行检测,在线将有缺陷的硅片剔除,将完好的硅片送入下一个环节.大大降低了人工强度和碎片率,减少了人工与硅片的接触,避免了人为因素对硅片的污染,有效地提高了成品率.
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| 关 键 词： | 硅片 检测 视觉系统 |
Vision System for Wafer Inspection |
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| TIAN Na,PANG Shi-jun,WEI Xiao-chong. Vision System for Wafer Inspection[J]. Electronics Process Technology, 2010, 31(5) |
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| Authors: | TIAN Na PANG Shi-jun WEI Xiao-chong |
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| Affiliation: | TIAN Na,PANG Shi-jun,WEI Xiao-chong(The 2nd Research Institute of CETC,Taiyuan 030024,China) |
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| Abstract: | Machine vision uses machine to replace the human eye to do all kinds of measurements and judgments.Introduce the automatic machine of silicon wafer installation.The edge of a silicon wafer is inspected by vision system.The defect silicon wafer is rejected in line.The integral silicon wafer is get into the next step.The ways greatly reduce the labor intensity and fragmentation rate,reduce touch with silicon by hand,avoid the pollution of human factors on the silicon,and improve the yield. |
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| Keywords: | Silicon wafer Inspection Vision system |
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