Preparation of Full-Dense Pb(Zr,Ti)O3 Ceramics by Aerosol Deposition

Full-dense fine-grained bulk Pb(Zr,Ti)O₃ (PZT) ceramics with a thicknesses of 300 μm were successfully obtained by aerosol deposition (AD) employing the starting powder subjected to an adequate pretreatment. It was found that formation of internal pores during the postdeposition firing treatment takes place in two different mechanisms on different scales. Residual carbons contained in the as-deposited PZT ceramics are responsible for the formation of extra-large pores, inducing severe distortion to the shape of the sample. On the other hand, trapped agglomerates in the as-deposited PZT ceramics are responsible for the formation of intermediate pores. The revealed mechanisms are discussed with a focus on the positive/negative correlation between the pretreatment procedure of starting powders and the formation of internal pores.