触针式轮廓仪弹性测量杆的设计

针对传统的触针式轮廓仪杠杆式测量杆的转动支点由于滚动体跳动容易引入随机误差的问题,提出并设计了一种基于弹性变形理论的轮廓仪测量杆。利用高精度电容传感器测量测量杆的弹性变形量,然后利用悬臂梁的挠曲线公式求出触针针尖的位移量从而得到待测面的微观不平度信息,消除了杠杆式测量杆引入的随机误差,进一步提高了粗糙度测量精度。

Design of Measuring Pole of Stylus Profilometer

Traditional lever-type profilometer has a hinge and the balls in the hinge result random error.This paper presents and designs a measuring pole based on elastic deformation theory.A high-precision capacitance sensor is used to measure the deformation of the pole.The displacement of the pinpoint is calculated by the deflection formula,so the microscopic information of the surface is presented.This method eliminates the random error and the measurement accuracy is improved.