基于飞秒激光的可运动微结构加工与旋转驱动

微驱动技术由于驱动方式的多样性和应用的广泛性,在近年来受到了越来越多的关注。本文提出一种利用飞秒激光同时实现微结构加工和旋转驱动的技术。利用双光子聚合加工直径20~30μm的微转子结构,然后结合空间光调制器调制出带有光学轨道角动量的光场,实现对微转子结构的旋转驱动,并获得了40 r/s的转动速率。详细介绍了利用飞秒激光直写技术加工可运动微转子结构的实验过程与优化参数,利用空间光调制器生成了不同拓扑荷的涡旋光,研究了其传播与聚焦特性,并用于驱动转子的顺、逆时针旋转运动。这种可控光学驱动技术在微流控、光镊技术、靶向药物运输、细胞动态行为等领域具有广阔的应用前景。

Fabrication and rotation driving of movable microstructures based on femtosecond laser

In recent years, microdriven technology has attracted increasing attention because of the diversity of driving methods and their extensive applications. This paper proposes a technique of microstructure processing and rotation driving with the use of a femtosecond laser. Microrotor structures with diameters of 20-30 μm were prepared through two-photon polymerization, and then an optical field with an optical orbital angular momentum was modulated using a spatial light modulator to realize the rotation driving of the microrotor structure at a speed of 40 r/s. In addition, the paper presents the detailed experimental process and optimization parameters of the microrotor structure fabricated using the femtosecond-laser direct writing technology. Moreover, the propagation and focusing characteristics of a vortex beam with different topological charges generated through a spatial light modulator are studied and used to drive the clockwise and counterclockwise rotations of the rotor. This controllable light-driven technology has promising applications in the fields of microfluidics, optical tweezers, targeted drug delivery, and cell dynamics.