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Structural study of amorphous In2O3 film by grazing incidence X-ray scattering (GIXS) with synchrotron radiation |
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| Authors: | Futoshi Utsuno Hiroyuki Inoue Yukio Shimane Shigeo Matsuzaki Ichiro Hirosawa Tetsuo Honma |
| Affiliation: | a Institute of Industrial Science, University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan b United Nation University, 5-53-70 Gingumae, Shibuya-ku, Tokyo 150-8925, Japan c Idemitsu Kosan, Co., Ltd., 1280 Kamiizumi, Sodegaura-shi, Chiba 299-0293, Japan d Japan Synchrotron Radiation Research Institute (JASRI), 1-1-1 Kouto, Mikazuki-cho, Sayo-gun, Hyogo 679-5198, Japan |
| Abstract: | Grazing incidence X-ray scattering (GIXS) using synchrotron radiation is a very useful method for structural analysis of amorphous films. We investigated the structure of amorphous In2O3 film utilizing GIXS at BL19B2 in SPring-8. Radial distribution function (RDF) was obtained from the measurement data. Structural models were constructed by molecular dynamics (MD) and reverse Monte-Carlo (RMC) simulations, and the calculated RDFs from the simulations were compared with that observed. It was found that the average oxygen coordination number around In ions was almost 6 and the average length 2.12 Å, which was smaller by about 3% than that of 2.18 Å in crystalline In2O3. It was concluded that the atomic arrangement of the amorphous In2O3 was characterized by the increase in the number and the boarder angle of distribution of corner-sharing In-O-In bond compared with crystalline In2O3. |
| Keywords: | Amorphous In2O3 Structure GIXS Simulation Synchrotron radiation |
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