| 正偏压对微波等离子体CVD法制备金刚石薄膜的影响 |
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| 引用本文： | 耿春雷,唐伟忠,黑立富.正偏压对微波等离子体CVD法制备金刚石薄膜的影响[J].金刚石与磨料磨具工程,2011,31(2):22-26. |
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| 作者姓名： | 耿春雷 唐伟忠 黑立富 |
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| 作者单位： | 1. 北京建筑材料科学研究总院有限公司,固废资源化利用与节能建材国家重点实验室(筹),北京,100041;北京科技大学,材料科学与工程学院,北京,100083
2. 北京科技大学,材料科学与工程学院,北京,100083 |
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| 摘 要： | 线形同轴耦合式微波等离子体CVD法是在硬质合金微型钻头(微钻)表面沉积金刚石涂层的最佳方法之一.本文首先研究了酸碱两步预处理后微钻表面的形貌和成分,然后研究了微钻工作表面金刚石的沉积情况,最后重点研究了正偏压对微钻不同位置金刚石生长的影响.结果表明,在微钻上施加50 V正偏压时,金刚石薄膜具有最佳的形貌和较好的均匀性.
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| 关 键 词： | 金刚石薄膜 酸碱两步法 微型钻头 正偏压 |
Effect of positive bias on the diamond coatings deposited by microwave plasma CVD method |
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| Geng Chunlei,Tang Weizhong,Hei Lifu.Effect of positive bias on the diamond coatings deposited by microwave plasma CVD method[J].Diamond & Abrasives Engineering,2011,31(2):22-26. |
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| Authors: | Geng Chunlei Tang Weizhong Hei Lifu |
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| Affiliation: | 1.Beijing Building Materials Academy of Sciences Research(Solid Wastes Resource Utilization and Energy Saving Building Materials-State Key Laboratory),Beijing 100041,China)(2.University of Science and Technology Beijing,Beijing 100083,China) |
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| Abstract: | The linear-coaxially coupled microwave plasma chemical vapor deposition（CVD） is one of the best methods to deposit diamond coatings on cemented carbide micro-drills.In this work,the morphology and composition of micro-drills after caustic and acidic pretreatment was studied.The morphology of diamond coatings on the drill working surface was also researched.More over,the effect of positive bias on diamond coating growth at different position of the drill was researched in detail.The results indicated that it could get the best diamond coatings by putting a 50 V positive bias on micro-drills. |
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| Keywords: | diamond coatings caustic and acidic pretreatment micro-drill positive bias |
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