| 基于PID反馈的高Q值加速度计闭环检测电路 |
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| 引用本文： | 孙腾,车录锋,黎晓林,吴健. 基于PID反馈的高Q值加速度计闭环检测电路[J]. 传感器与微系统, 2011, 30(2): 101-103,106 |
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| 作者姓名： | 孙腾 车录锋 黎晓林 吴健 |
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| 作者单位： | 1. 中国科学院,上海微系统与信息技术研究所,传感技术联合国家重点实验室,上海,200050;中国科学院,研究生院,北京,100039
2. 中国科学院,上海微系统与信息技术研究所,传感技术联合国家重点实验室,上海,200050 |
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| 基金项目： | 国家"863"计划资助项目 |
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| 摘 要： | 高Q值加速度计由于能够很好地降低热机械布朗噪声,被广泛应用于高精度低噪声检测领域,相应的闭环接口电路却成为其应用的困难之一.通过分析传感器的器件结构和动态响应,提出了一种基于PID反馈的闭环检测电路来克服传感器因高Q值造成的不利影响,改善系统的频率特性和动态响应.根据设计原理设计和测试了基于PCB板级的闭环检测电路.电...
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| 关 键 词： | 高Q值 加速度计 PID反馈 闭环检测 |
Closed loop detection circuit for high Q value accelerometer based on PID feedback |
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| SUN Teng,CHE Lu-feng,LI Xiao-lin,WU Jian. Closed loop detection circuit for high Q value accelerometer based on PID feedback[J]. Transducer and Microsystem Technology, 2011, 30(2): 101-103,106 |
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| Authors: | SUN Teng CHE Lu-feng LI Xiao-lin WU Jian |
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| Abstract: | As high Q value accelerometer has the advantage of reducing thermal-mechanical Brownian noise,it is widely used in high precision low noise measurement field,but the closed loop circuit becomes one of the difficulties for application.With the analysis of the structure and the dynamic response of this kind of accelerometer,a closed loop detection circuit based on PID feedback is presented to over-come the disadvantage effect of high Q value accelerometer.Based on the design theory,a PCB board level circuit is designed for the test.Measurement results indicate that the circuit effectively improves the bandwidth,linearity,dynamic response time of the system. |
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| Keywords: | high Q value accelerometer PID feedback closed loop detection |
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