| 基于静电力的微液滴驱动芯片 |
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| 引用本文： | 刘翔,高安然,李铁,周萍,王跃林.基于静电力的微液滴驱动芯片[J].传感器与微系统,2011,30(2):116-118,121. |
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| 作者姓名： | 刘翔 高安然 李铁 周萍 王跃林 |
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| 作者单位： | 1. 中国科学院,上海微系统与信息技术研究所,传感技术联合国家重点实验室,上海,200050;中国科学院研究生院,北京,100049
2. 中国科学院,上海微系统与信息技术研究所,传感技术联合国家重点实验室,上海,200050 |
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| 基金项目： | 国家重点基础研究发展计划(973)资助项目，国家高技术研究发展计划(863)资助项目，国家自然基金委创新团队资助项目 |
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| 摘 要： | 为了精确操控微流体,设计并制作了一种基于静电力的微液滴驱动芯片.介绍了驱动原理和工艺流程,搭建了驱动检测实验平台.芯片采用开放式的结构,只需单层共平面控制电极,以硅作衬底,氧化硅和多晶硅作绝缘层,重掺杂多晶硅为驱动电极阵列,高质量Si3N4作介质层,碳氟聚合物为疏水层.实验表明:微液滴可在芯片上按程序设定方式在二维平面...
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| 关 键 词： | 微流控 液滴 静电驱动 共平面电极 |
Droplet actuating chip based on electrostatic force |
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| LIU Xiang,GAO An-ran,LI Tie,ZHOU Ping,WANG Yue-lin.Droplet actuating chip based on electrostatic force[J].Transducer and Microsystem Technology,2011,30(2):116-118,121. |
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| Authors: | LIU Xiang GAO An-ran LI Tie ZHOU Ping WANG Yue-lin |
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| Abstract: | A droplet actuating chip was designed and fabricated using electrostatic force to manipulate microfluid.The actuation principle and fabrication processes are introduced.Experimental platform for actuating test are demonstrated.With open structure,the chip consists of silicon as substrate,silicon oxide and polysilicon as insulating layer,heavily doped polysilicon as actuating electrode arrays,high quality Si3N4 film as dielectric layer,and fluorocarbon polymer as hydrophobic layer.Experiment shows that the droplet is transported smoothly in a programmable manner in the two-dimensions plane at a minimum voltage of 15V,and the maximum speed reached to 96mm/s.The droplet actuating chip can be used in lab-on-a-chip system due to its simple fabrication process and convenient operation. |
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| Keywords: | microfluidics droplet electrostatic actuation coplanar electrode |
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