SiCrOxNy选择性吸收涂层制备及性能研究

采用直流及中频反应溅射在铜基底上沉积SiCrO_xN_y光谱选择性吸收涂层。对该涂层的光学性能进行表征,其吸收比为0.938,80℃发射比为0.07。经300℃,200 h热处理后,吸收比无明显变化,发射比小幅升高;俄歇电子能谱(AES)分析显示,界面处元素扩散和Cu基底氧化是涂层光学性能下降的主要原因。在35℃下进行5%盐雾腐蚀试验,腐蚀初期涂层发射比迅速升高,腐蚀36 h后吸收比衰减加速,涂层表面开始出现剥落现象;致密的SiO2减反射层对增强涂层耐盐雾腐蚀性能有明显效果。

PREPARATION AND PROPERTIES OF SiCrOxNy SELECTIVE ABSORBING COATINGS

SiCrO_xN_y selective absorbing coatings are deposited on copper substrate by DC and IF sputtering.The absorption rate of the coatings reaches 0.938 and the emissivity is 0.07 at 80℃.After heat treatment at 300℃for 200 h,the absorptivity do not change significantly,but the emissivity increases slightly.AES analysis shows that the main reason for the decrease of optical properties is the diffusion of elements at the interface and the oxidation of Cu substrate.The 5%salt spray corrosion test was carried out at 35℃.At the beginning of corrosion,the emissivity of the coating increases rapidly,the absorption rate decrease after 36 h corrosion,and the surface of the coating begin to peel off.The dense SiO2 anti-reflective coating plays an important role in enhancing the weather resistance of the SiCrO_xN_y coating.