| 半导体厂超净供气系统 |
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| 引用本文： | 梁国仑,余京松. 半导体厂超净供气系统[J]. 半导体技术, 1999, 24(5): 59-63 |
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| 作者姓名： | 梁国仑 余京松 |
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| 作者单位： | 1. 化工部光明化工研究设计院,大连,116031
2. 浙江大学材料系功能室,杭州,310027 |
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| 摘 要： | 介绍了集成电路制造用的电子气体中粒子控制规范，供气系统用的材料及其处理技术，供气管路和配件技术，粒子过滤及计数技术。
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| 关 键 词： | 供气系统 粒子过滤 粒子计数器 粒子规范 |
| 修稿时间： | 19980825 |
Vltra-Cleen Gas Distribution System for Semiconductor Plant |
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| Liang Guolun,Yu Jingsong. Vltra-Cleen Gas Distribution System for Semiconductor Plant[J]. Semiconductor Technology, 1999, 24(5): 59-63 |
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| Authors: | Liang Guolun Yu Jingsong |
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| Affiliation: | Liang GuolunGuangming Research & Design Institute of chemical Industry(The Ministry of Chemical industry,Dalian 116031)Yu Jingsong(Department of Materials of Zhejiang University,Hangzhou 312207) |
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| Abstract: | The controlling specifications of the particle in the electronic gas used for IC manufacturing,materials used for distribution system and its preparation technologies,gas distribution tubes and accessory parts technologies,particle filtering and countering technologies,are described is this paper. |
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| Keywords: | Gas distribution system Particle filtering Particle counter Particle standardsAPPLICATION TO FAULT DIAGNOSIS$$$$ PEN Zhi gang ZHANG Ji hui XU Xin he (Control & Simulation Center Northeasterh University Shenyang 110006)Abstract A |
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