CO2激光直写制作聚酰亚胺多模波导技术的研究

为了研究适合制作大面积波导的CO2激光直写制作聚酰亚胺多模波导技术,采用理论模拟和工艺研究的方法,通过建立激光加工模型,得到了激光扫描线的温度分布与加工参量的关系,提出了增加波导侧面陡直性的方法;通过对实验结果的分析,研究了加工参量对波导材料性能、波导结构和表面粗糙度的影响。结果表明,控制激光功率密度、直写速率和光阑位置可以控制波导的宽度、侧面陡直性和表面粗糙度。

Study on CO2 laser direct writing polyimide waveguide

The method of fabricating polyimide multimode waveguide by CO2 laser direct-writing was studied in this paper. The relationship between the temperature distribution in the material and the parameters of laser scanning was studied by numerical approaching. As a result, the method for increasing the verticality of the sidewall of the waveguide was proposed. The influence of the processing parameters on the property of the waveguide material, the structure of the waveguide and the roughness on the surface of the waveguide was also studied by experimental method.