| 等离子体辐照对第一镜表面反射率的影响研究 |
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| 引用本文： | 陈聚,鄢容,陈俊凌. 等离子体辐照对第一镜表面反射率的影响研究[J]. 表面技术, 2010, 39(4): 30-32. DOI: 10.3969/j.issn.1001-3660.2010.04.009 |
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| 作者姓名： | 陈聚 鄢容 陈俊凌 |
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| 作者单位： | 中国科学院等离子体物理研究所,合肥,230031;中国科学院等离子体物理研究所,合肥,230031;中国科学院等离子体物理研究所,合肥,230031 |
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| 基金项目： | 国家自然科学基金资助项目(10775138) |
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| 摘 要： | 研究了多晶钼、钨第一镜样品经等离子体辐照前后的表面形貌及反射率变化。实验结果表明:第一镜表面的各个部位在石墨限制器以下所处的区域不同,经等离子体辐照后,处于沉积区的镜面比处于腐蚀区的镜面相对平滑,反射率也相对较高,此外,在保持表面反射率性能方面,钨第一镜样品要优于钼第一镜样品。
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| 关 键 词： | 第一镜 反射率 腐蚀 沉积 |
| 收稿时间： | 2010-04-22 |
| 修稿时间： | 2010-08-10 |
Study on Influence of Plasma Irradiation on First Mirror Reflectivity |
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| CHEN Ju,YAN Rong and CHEN Jun-ling. Study on Influence of Plasma Irradiation on First Mirror Reflectivity[J]. Surface Technology, 2010, 39(4): 30-32. DOI: 10.3969/j.issn.1001-3660.2010.04.009 |
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| Authors: | CHEN Ju YAN Rong CHEN Jun-ling |
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| Affiliation: | CHEN Ju,YAN Rong,CHEN Jun-ling(Institute of Plasma Physics,Chinese Academy of Sciences,Hefei 230031,China) |
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| Abstract: | It mainly investigated the change of morphology and optical reflectivity of polycrystalline Mo and W first mirror before and after exposure.Due to each part of the mirror surface located in different region under graphite limiter,the morphology and reflectivity of some part on mirror surface which located in deposition-dominated region maintained better than that of other part which located in erosion-dominated region after plasma exposure.In the same experiment,it was found that the reflectivity of W first... |
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| Keywords: | first mirror reflectivity erosion deposition |
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