高精度六维激光测量系统误差补偿算法研究

根据极大规模集成电路制造对光刻物镜中敏感光学元件调节机构高精度的调整要求,研究设计了一套基于双频激光干涉仪的高精度六自由度位姿检测测量系统。但由于双频激光干涉仪是一种线性增量式的测长仪器,其固有的机械安装误差及运动平台在工作过程中引入的倾斜或旋转运动都将导致测量光程的变化而产生阿贝误差与余弦误差。为此,根据系统测量原理,采用解析法基于空间齐次变换建立了系统误差补偿数学模型,并深入分析了装调误差对测量精度的影响,实现了调节机构六自由度运动的高精度测量。

Research on error compensation algorithm for high precision 6-DOF laser measurement system

In order to meet high precision requirement of the lithography lens optics adjustment mechanism for enormous scale integrated circuit manufacturing, an ultra precision six DOF position and orientation detection measurement system based on dual frequency laser interferometer was designed in this paper. However, due to the dual frequency laser interferometer is a linear incremental length measuring instrument, its inherent mechanical installation error, tilting or rotational movement of the platform during operation will result in a change in the measurement optical path, and the Abbe error or cosine error is generated. Therefore, according to the principle of measurement system the error compensation model is established based on space homogeneous transformation. And the impact of alignment error on the measurement accuracy of the system is in depth analyzed, and the ultra high precision measurement of the adjustment mechanism in six degrees of freedom is realized.