Ozone Production in a Dielectric Barrier Discharge with Ultrasonic Irradiation

Ozone production has been investigated using an atmospheric pressure dielectric barrier discharge in pure O₂ at room temperature with and without ultrasonic irradiation. It was driven at a frequency of either 15 kHz or ～40 kHz. The ozone production was highly dependent on the O₂ flow rate and the discharge power. Furthermore, powerful ultrasonic irradiation at a fundamental frequency of ～30 kHz with the sound pressure level of ～150 dB into the discharge can improve the ozone production efficiency, particularly when operated at the frequency of 15 kHz at the flow rate of 15 L/min.