| 用于精密测量的光纤偏振光干涉仪 |
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| 引用本文： | 朱昊,田芊,章恩耀,徐铁军,原诚寅.用于精密测量的光纤偏振光干涉仪[J].半导体光电,2001,22(2):93-96,143. |
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| 作者姓名： | 朱昊 田芊 章恩耀 徐铁军 原诚寅 |
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| 作者单位： | 清华大学 精密仪器系 |
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| 摘 要： | 能对位移和振动进行高精度测量的光纤振光干涉仪是一种将偏振光干涉技术与光纤传感技术相结合的新型光纤传感器。当被测物表面反射光与自聚焦透镜端面反射光相干涉时，根据偏振角反推被测物的微波位移，理论上其测量精度可达到0．01nm，可用于生产过程中非接触在线测量与监控。介绍了这种光纤传感器的原理，给出了实验结果并进行了分析讨论。
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| 关 键 词： | 光纤传感器 偏振光 干涉仪 精密测量 |
| 文章编号： | 1001-5868(2001)02-0093-04 |
Study on Fiber Polarized-light Interferometer for Precise Measurement |
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| ZHU Hao,TIAN Qian,ZHANG En-yao,XU Tie-jun,YUAN Cheng-yin.Study on Fiber Polarized-light Interferometer for Precise Measurement[J].Semiconductor Optoelectronics,2001,22(2):93-96,143. |
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| Authors: | ZHU Hao TIAN Qian ZHANG En-yao XU Tie-jun YUAN Cheng-yin |
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| Abstract: | A fiber polarized light interferometer for high precise measurement of vibration is introduced in this paper. This is a novel fiber sensor combining polarized light interference technology with fiber sensor technology. The accuracy of this method is 0.01 nm in theory. It is suitable for on line non contact measurement and monitor in production process. The principle, research and analysis on experimental results of this interferometer are described. |
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| Keywords: | fiber sensor polarization interference |
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