薄膜晶体管中绝缘层的研究现状与趋势

本文主要介绍了绝缘层在薄膜晶体管中的重要作用,总结了在薄膜晶体管中应用的绝缘层材料种类及其特点,介绍了不同绝缘层的制备工艺,以及各种制备工艺的原理与特点。最后,通过分析近几年有关薄膜晶体管绝缘层的文献,介绍了薄膜晶体管在制备过程中遇到的主要问题及当前的研究热点,并对未来薄膜晶体管中绝缘层的制备工艺和绝缘材料的研究方向进行了展望。

Research status and trends of insulating layer in thin-film transistor

This paper mainly describes the important role of thin film transistor dielectric, and summarizes the dielectric material type and its characteristics in the thin film transistor application, describes the preparation process of different insulation layers, and the principle and characteristic between different processes. Finally, through analysis of the latest literature on thin film transistor dielectric, the paper summarizes the main problems encountered in the preparation process and the current research focus, and finally prospects the future research directions of the technology for preparing thin film transistors and the dielectric materials.