| 超精密驱动机构比较 |
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| 引用本文： | 田军委,王建华,李平,徐萍.超精密驱动机构比较[J].西安工业学院学报,2002,22(1):62-66. |
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| 作者姓名： | 田军委 王建华 李平 徐萍 |
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| 作者单位： | 西安工业学院机电工程系 陕西西安710032
(田军委，王建华，李平)，西安工业学院机电工程系 陕西西安710032(徐萍) |
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| 摘 要： | 介绍了滚珠丝杠、静压丝杠、直线电机、摩擦驱动等超精密驱动机构，比较分析了各机构的优缺点及其在超精密加工领域中的应用前景。
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| 关 键 词： | 超精密加工 定位精度 分辨率 驱动机构 |
| 文章编号： | 1000-5714(2002)01-0062-05 |
| 修稿时间： | 2001年10月8日 |
The comparison of driving mechanisms with ultra precision |
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| TIAN Jun wei,WAND Jian hua,LI Ping,XU Ping.The comparison of driving mechanisms with ultra precision[J].Journal of Xi'an Institute of Technology,2002,22(1):62-66. |
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| Authors: | TIAN Jun wei WAND Jian hua LI Ping XU Ping |
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| Abstract: | The application and the development of ultra precision machining are introduced briefly. Driving mechanisms based on ball screw, hydrostatic screw,linear motor, friction driving structure are also introduced in this paper. The advantages and disadvantages of these driving mechanisms and their application prospect are discussed. |
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| Keywords: | ultra precision machining positional precision distinguish rate driving mechanism |
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