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基于表面等离子体共振和双频激光干涉相位测量的空气折射率测量
引用本文:陈强华,罗会甫,王素梅,王锋,陈新华.基于表面等离子体共振和双频激光干涉相位测量的空气折射率测量[J].中国激光,2013,40(1):108001-192.
作者姓名:陈强华  罗会甫  王素梅  王锋  陈新华
作者单位:陈强华:北京理工大学机械与车辆学院, 先进加工技术国防重点学科实验室, 北京 100081
罗会甫:北京理工大学机械与车辆学院, 先进加工技术国防重点学科实验室, 北京 100081
王素梅:北京理工大学机械与车辆学院, 先进加工技术国防重点学科实验室, 北京 100081
王锋:北京理工大学机械与车辆学院, 先进加工技术国防重点学科实验室, 北京 100081
陈新华:北京理工大学机械与车辆学院, 先进加工技术国防重点学科实验室, 北京 100081
基金项目:国家自然科学基金(51005022、51105038、90923039)资助课题。
摘    要:设计了一种基于表面等离子体共振和相位检测的空气折射率实时测量系统,该系统采用双频激光外差干涉光路和具有角漂移自适应结构的表面等离子体共振传感器。理论分析表明测量光信号的p、s分量的相位差相对于参考光信号的变化与空气折射率近似呈线性关系,并由此得到测量公式,传感器的自适应结构将角漂移引起的误差降低了一个数量级并大幅提高了测量灵敏度。与Edlen公式的测量比对实验结果表明,在44.0°入射角(共振角附近)和0.1°的相位测量精度下,空气折射率的测量精度优于5×10-6。该测量系统还可为更高精度的空气折射率测量仪提供足够精确的初值。

关 键 词:测量  空气折射率  表面等离子体共振  角漂移自适应结构  相位测量  干涉测量
收稿时间:2012/8/15

Measurement of Air Refractive Index Based on Surface Plasmon Resonance and Phase Detection by Dual-Frequency Laser Interferometry
Chen Qianghua Luo Huifu Wang Sumei Wang Feng Chen Xinhua.Measurement of Air Refractive Index Based on Surface Plasmon Resonance and Phase Detection by Dual-Frequency Laser Interferometry[J].Chinese Journal of Lasers,2013,40(1):108001-192.
Authors:Chen Qianghua Luo Huifu Wang Sumei Wang Feng Chen Xinhua
Affiliation:Chen Qianghua Luo Huifu Wang Sumei Wang Feng Chen Xinhua(Key Laboratory of Advanced Machining Fundamental Science for National Defense,School of Mechanical Engineering,Beijing Institute of Technology,Beijing 100081,China)
Abstract:A measurement system of refractive index of air (RIA) based on surface plasmon resonance (SPR) and phase detection is presented. A heterodyne interference optical path is built and a SPR sensor with self-adaptive structure for angle shift is applied. Theoretical analyses indicate that the variation of the phase difference between p and s polarization components of the measurement signal versus that of the reference signal is almost linear with RIA fluctuation. Thus the formula of RIA measurement is derived. The application of the self-adaptive SPR sensor reduces the measurement error by an order of magnitude and greatly improves the sensitivity. The comparison experiments with the method of Edlen equations show that the measurement accuracy reaches less than 5×10-6 at the phase detection precision of 0.1° and the incident angle of 44.0° (which is close to the resonance angle). Furthermore, the measurement system can provide an initial estimate of RIA accurate enough for other measuring instruments with higher precision.
Keywords:measurement  refractive index of air  surface plasmon resonance  self-adaptive structure for angle shift  phase detection  interferometry
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