Stacking of nanocrystalline graphene for nano-electro-mechanical (NEM) actuator applications |
| |
Authors: | Jothiramalingam Kulothungan Schmidt Marek E. Manoharan Muruganathan Hammam Ahmed M. M. Mizuta Hiroshi |
| |
Affiliation: | 1.School of Materials Science, Japan Advanced Institute of Science and Technology, Nomi, Ishikawa, 923-1292, Japan ;2.Physics Department, Faculty of Science, Minia University, Main Road-Shalaby Land, Minia, 11432, Egypt ;3.Hitachi Cambridge Laboratory, Hitachi Europe Ltd., J.J Thomson Avenue, Cambridge, CB3 0HE, UK ; |
| |
Abstract: | Graphene nano-electro-mechanical switches are promising components due to their excellent switching performance such as low pull-in voltage and low contact resistance. Mass fabrication with an appropriate counter electrode remains challenging. In this work, we report the stacking of nanocrystalline graphene (NCG) with a 70-nm dielectric separation layer. The buried NCG layer is contacted through the formation of vias and acts as actuation electrode. After metallization, the top 7.5-nm thin NCG layer is patterned to form double-clamped beams, and the structure is released by hydrofluoric acid etching. By applying a voltage between the top and buried NCG layer, a step-like current increase is observed below 1.5 V, caused by the contact of the movable beam with the buried NCG. No pull-out is observed due to the thin sacrificial layer and high beam length, resulting in low mechanical restoring force. We discuss the possible applications of the NCG stacking approach to realize nano-electro-mechanical contact switches and advanced logical components such as a AND logic. |
| |
Keywords: | |
本文献已被 SpringerLink 等数据库收录! |
|