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Analysis of uniform structured RF MEMS switch with different uniform and non-uniform meandering techniques
Authors:Srinivasa Rao  K.  Sailaja  B. V. S.  Kumar  Akshay  Vineetha  K.  Guha  Koushik  Baishanab  K. L.  Girija Sravani  K.
Affiliation:1.MEMS Research Center, Department of Electronics and Communication Engineering, Koneru Lakshmaiah Education Foundation (Deemed to be University), Green Fields, Vaddeswaram, Guntur, 522502, India
;2.National MEMS Design Centre, Department of Electronics and Communication Engineering, National Institute of Technology (NIT), Silchar, Assam, India
;
Abstract:Microsystem Technologies - This paper mainly focuses on the investigation of different meandering techniques for the MEMS RF shunt capacitive switch. It involves three meandering techniques for the...
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