|
|||||
|
|
Acoustic mode confinement using coupled cavity structures in UHF unreleased MEMS resonators |
|
| Authors: | Erbes Andreja Wang Wentao Weinstein Dana Seshia Ashwin A. |
| Affiliation: | 1.Department of Engineering, University of Cambridge, Cambridge, UK ;2.EECS Department, Massachusetts Institute of Technology, Cambridge, USA ; |
| Abstract: | |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ | |