Stiction-protected MEMS switch with low actuation voltage |
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| Authors: | Uvarov Ilia V Kupriyanov Alexander N |
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| Affiliation: | 1.Laboratory of Micro- and Nanosystem Technology, Institute of Physics and Technology of Russian Academy of Sciences, Yaroslavl Branch, Universitetskaya 21, 150007, Yaroslavl, Russia
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| Abstract: | Microsystem Technologies - Commercial success of microelectromechanical systems (MEMS) switches is limited by several issues. A high actuation voltage requires special circuitry solutions that... |
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