Mechanical scanning of the specimen in the scanning electron microscope |
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Authors: | Oho Eisaku Miyamoto Makoto |
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Affiliation: | Department of Electrical Engineering, Kogakuin University, Tokyo, Japan. oho@cc.kogakuin.ac.jp |
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Abstract: | A scanning electron microscope (SEM) system equipped with a motor drive specimen stage fully controlled with a personal computer (PC) has been utilized for obtaining ultralow magnification SEM images. This modem motor drive stage works as a mechanical scanning device. To produce ultra-low magnification SEM images, we use a successful combination of the mechanical scanning, electronic scanning, and digital image processing techniques. This new method is extremely labor and time saving for ultra-low magnification and wide-area observation. The option of ultra-low magnification observation (while maintaining the original SEM functions and performance) is important during a scanning electron microscopy session. |
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Keywords: | ultra‐low magnification mechanical scanning digital image processing scanning electron microscope personal computer‐scanning electron microscope |
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