| 声表面波的衰减与声表面波传感技术 |
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| 引用本文： | 戴恩光,冯冠平.声表面波的衰减与声表面波传感技术[J].仪器仪表学报,1997,18(5):449-452,474. |
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| 作者姓名： | 戴恩光 冯冠平 |
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| 作者单位： | 清华大学精密仪器与机械学系 |
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| 摘 要： | 首先研究声表面波器件沉各积有机薄膜时引起的表现波衰减，从理论上分析了声表面波器件性能变化问题，然后研究了采用ＳＡＷ谐振器对有机气体进行检测时，膜层引起的衰减对传感器性能的影响，目的是研究如何合理地利用表面波器件检测化学器。
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| 关 键 词： | 声表面波 传感器 表面波衰减 气敏 |
The Attenuation of Surface Acoustic Wave and SAW Sensing Technology |
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| Dai,En-guang Feng,Guan-ping.The Attenuation of Surface Acoustic Wave and SAW Sensing Technology[J].Chinese Journal of Scientific Instrument,1997,18(5):449-452,474. |
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| Authors: | Dai En-guang Feng Guan-ping |
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| Affiliation: | Dept.of Precision Instuments and Mechanology of Tsinghua Univ.Beijing 100871 |
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| Abstract: | The attenuation of SAW device coated with organic film have been studied and the changes of SAW performance are studied theoretically.Then,the attenuation effect of film on the performance of sensor is analysed when a SAW resonator is adopted to detect organic vapour.The aim of these works is at how to use SAW device correctly and efficiently. |
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| Keywords: | SAW Sensor Attenuation of SAW Sensitivity |
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