| 我国电子气体的开发与进展 |
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| 引用本文： | 梁国仑.我国电子气体的开发与进展[J].精细与专用化学品,1999,7(10):13-14. |
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| 作者姓名： | 梁国仑 |
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| 作者单位： | 化工部光明化工研究设计院 |
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| 摘 要： | 由于我国电子气体行业起步晚,投入不够,导致在产品开发能力、大生产技术、生产规模、应用技术等方面均与国外有一定差距。
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| 关 键 词： | 电子气体 集成电路 配套器件 |
DEVELOPMENT AND PROGRESS MADE IN ELEC- TRONIC GASES IN CHINA. |
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| Liang Guolun.DEVELOPMENT AND PROGRESS MADE IN ELEC- TRONIC GASES IN CHINA.[J].Fine and Specialty Chemicals,1999,7(10):13-14. |
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| Authors: | Liang Guolun |
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| Abstract: | There is a good bit of gap as compared with foreign countries in development capacity, massive production technologies, production scale and application technologies, due to late start and inadequate input in electronic gas industry. |
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| Keywords: | electronic gas integrated circuit electronic chemicals |
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