双向支撑超声波悬浮轴承的设计及试验

超声频域下的振动可以形成对物体的悬浮，将这种悬浮用作对轴的支撑即形成为超声波轴承。本文提出一种对轴径向和轴向同时进行悬浮支撑的双向超声波轴承，分析了这种轴承表面超声辐射压力的形成方法，设计了双向支撑轴承结构，并针对不同悬浮间隙下轴的最大转速进行了测试。结果表明轴最高转速达到了8946rpm，当转速过大时由于离心力较大将导致轴与轴承发生碰撞而无法工作，因而做好转子的动平衡对提高双向支撑超声波轴承的工作性能十分重要。

Structure Design And Experimental Study On Ultrasonic Levitation Bearing Which Support Shaft In Two Directions

Vibration with ultrasonic frequency could levitate object, with this levitation to support shaft which we call it ultrasonic bearing. This paper give one bidirectional ultrasonic bearing which levitate and support the shaft in lengthways and radial direction, analyse the formation methods of ultrasonic radiation pressure on this kind of bearing, design the structure of the bearing which support the shaft in two directions, and test the max rotate speed of the shaft base on different clearances. Result show that the max rotate speed could be 8946rpm, the higher the rotate speed is, the bigger the centrifugal force is, which will result in the shaft hit the bearing and make the levitation and support function out of work, so it is very important to balance the rotor for improving the function of bidirectional support ultrasonic bearing.