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| 上海第三代同步辐射装置及其 在光刻和LIGA中的应用 | |
| 引用本文： | 谢常青,叶甜春.上海第三代同步辐射装置及其 在光刻和LIGA中的应用[J].半导体技术 |
| 作者姓名： | 谢常青 叶甜春 |
| 摘 要： | |
| 文章编号： | 1003-353X(2000)1-11-03 |
The 3rd Generation of Shanghai Synchrotron Radiation Facility and Its Application in Lithography and LIGA |
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| Xie Changqing,Ye Tianchun .The 3rd Generation of Shanghai Synchrotron Radiation Facility and Its Application in Lithography and LIGA[J].Semiconductor Technology | |
| Authors: | Xie Changqing " target="_blank">Ye Tianchun |
| Affiliation: | Xie Changqing,Ye Tianchun |
| Abstract: | |
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