| Co2Z软磁铁氧体薄膜的磁性能 |
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| 引用本文： | 郝思坤,黎伟,孟卫民,白建民,杨正,魏福林. Co2Z软磁铁氧体薄膜的磁性能[J]. 磁性材料及器件, 2011, 42(3): 13-16 |
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| 作者姓名： | 郝思坤 黎伟 孟卫民 白建民 杨正 魏福林 |
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| 作者单位： | 兰州大学磁学与磁性材料教育部重点实验室磁性材料研究所; |
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| 摘 要： | 首先用球磨法制备了BaxCo2Fe24O41铁氧体粉料,烧结后制得块体材料,然后以其为靶材,用射频磁控溅射的方法在单晶硅基片上制备了膜厚为100nm的铁氧体薄膜.实验表明,沉积态的薄膜为非晶态结构,经过高温热处理后形成了较好的磁铅石结构.研究了成分、热处理温度、氧分压对薄膜结构和磁性能的影响.通过对热处理温度和氧分压的...
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| 关 键 词： | Ba3Co2Fe24O41 铁氧体 薄膜 溅射 热处理 磁性能 |
Magnetic properties of Co2Z type ferrite thin films |
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| HAO Si-kun,LI Wei,MENG Wei-ming,BAI Jian-min,YANG Zheng,WEI Fu-lin. Magnetic properties of Co2Z type ferrite thin films[J]. Journal of Magnetic Materials and Devices, 2011, 42(3): 13-16 |
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| Authors: | HAO Si-kun LI Wei MENG Wei-ming BAI Jian-min YANG Zheng WEI Fu-lin |
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| Affiliation: | HAO Si-kun,LI Wei,MENG Wei-ming,BAI Jian-min,YANG Zheng,WEI Fu-lin Key Laboratory for Magnetism and Magnetic Materials of the Ministry of Education,Research Institute of Magnetic Materials,School of Physical Science & Technology,Lanzhou University,Lanzhou 730000,China |
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| Abstract: | Firstly,powders of BaxCo2Fe24O41 ferrites were prepared by ball milling method and bulk materials were prepared by sintering the powders.Then the bulk materials were used as targets for this experiment.Ba3Co2Fe24O41 ferrite films with thickness of 100 nm have been deposited on Si substrate by RF magnetron sputtering.Experiments indicated that the as-deposited films were amorphous,after annealing in air at different temperatures magnetoplumbite phase was formed.The influence of composition,annealing and part... |
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| Keywords: | Ba3Co2Fe24O41 ferrite film sputtering heat treatment magnetic properties |
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