Defect chemistry of nano-grained barium titanate films |
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Authors: | Jon F Ihlefeld Mark D Losego Ramòn Collazo William J Borland Jon-Paul Maria |
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Affiliation: | (1) Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695, USA;(2) The Pennsylvania State University, University Park, PA 16802, USA;(3) DuPont Electronic Technologies, Research Triangle Park, NC 27709, USA |
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Abstract: | Polycrystalline barium titanate thin films have been prepared with 100 ppm of B-site acceptor dopants Ca, Mg, and Mn via chemical solution deposition on base metal substrates. The films are fired in low
pO2 atmospheres at 900 °C to prevent substrate oxidation. All dopant species produce low loss, space-charge free material without
secondary reoxidation anneals. We note that the dopant concentrations required to compensate for oxygen non-stoichiometry
are substantially greater than expected by equilibrium thermodynamic calculations. This observation is rationalized in the
context of a composite oxygen defect model with differing reduction enthalpies for grain interiors and surfaces. |
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