| 自制纳米金属掩模对AlGaInPLED光提取效率的改进 |
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| 引用本文： | 蒋文静,徐晨,沈光地,方瑢,高伟. 自制纳米金属掩模对AlGaInPLED光提取效率的改进[J]. 半导体学报, 2010, 31(6): 064008-3 |
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| 作者姓名： | 蒋文静 徐晨 沈光地 方瑢 高伟 |
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| 基金项目： | 国家高技术研究发展计划 2008AA03Z402 |
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| 摘 要： | In conventional light-emitting diodes (LED’s), the external efficiency is limited by total internal reflection at the semiconductor-air interface. An LED with a textured top surface can increase the light-extraction efficiency. This paper reports a new method to fabricate AlGaInP-based nanorod light emitting diodes (LEDs) by using self-assemble metal layer nano-masks and inductively coupled plasma (ICP). Light power measurements indicates that the scattering of photons considerably enhance the probability of escaping from the nanorod LEDs. The light-intensity of the nanorod LED is increased by 34% for a thin GaP window layer, and by 17% for 8 μm GaP window layer. The light power of the nanorod LED is increased by 25% and 13%, respectively.
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| 关 键 词： | LED 自组装 金属层 nP型 提取 功率测量 纳米棒 电感耦合 |
Improved light extraction in AlGaInP-based LEDs using a self-assembly metal nanomask |
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| Jiang Wenjing,Xu Chen,Shen Guangdi,Fang Rong and Gao Wei. Improved light extraction in AlGaInP-based LEDs using a self-assembly metal nanomask[J]. Chinese Journal of Semiconductors, 2010, 31(6): 064008-3 |
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| Authors: | Jiang Wenjing Xu Chen Shen Guangdi Fang Rong Gao Wei |
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| Affiliation: | Beijing Optoelectronic Technology Laboratory, Institute of Electronic Engineering and Information, Beijing University of Technology, Beijing 100124, China;Beijing Optoelectronic Technology Laboratory, Institute of Electronic Engineering and Information, Beijing University of Technology, Beijing 100124, China;Beijing Optoelectronic Technology Laboratory, Institute of Electronic Engineering and Information, Beijing University of Technology, Beijing 100124, China;Beijing Optoelectronic Technology Laboratory, Institute of Electronic Engineering and Information, Beijing University of Technology, Beijing 100124, China;Beijing Optoelectronic Technology Laboratory, Institute of Electronic Engineering and Information, Beijing University of Technology, Beijing 100124, China |
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| Abstract: | |
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| Keywords: | AlGaInP-LED nano-mask light power |
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