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| 磁控溅射中频电源仿真研究 | |
| 引用本文： | 陈文光,何怡刚,肖金凤. 磁控溅射中频电源仿真研究[J]. 机械与电子, 2005, 0(3): 69-71 |
| 作者姓名： | 陈文光 何怡刚 肖金凤 |
| 作者单位： | 1. 南华大学,湖南,衡阳,421001;湖南大学,湖南,长沙,410082 2. 湖南大学,湖南,长沙,410082 3. 南华大学,湖南,衡阳,421001 |
| 摘 要： | 磁控溅射中频电源及其辉光放电负载是一个典型的强非线性时变系统，对该系统建模并求其解析解是相当困难的。使用Simulink对磁控溅射中频电源建模，对电源工作时各种工况下输出电流波形进行了研究，研究表明，这种仿真方法对电源系统设计有效，可以推广应用。 |
| 关 键 词： | 磁控溅射 电源 脉宽调制 仿真 |
| 文章编号： | 1001-2257(2005)03-0069-03 |
| 修稿时间： | 2005-01-07 |
The Simulation Research on Medium-frequency Power Supply for Magnetron Sputtering |
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| CHEN Wen-Guang,HE Yi-gang,XIAO Jin-feng. The Simulation Research on Medium-frequency Power Supply for Magnetron Sputtering[J]. Machinery & Electronics, 2005, 0(3): 69-71 | |
| Authors: | CHEN Wen-Guang HE Yi-gang XIAO Jin-feng |
| Affiliation: | CHEN Wenguang~ |
| Abstract: | The mediumfrequency power supply for magnetron sputtering and its arcing discharge load are a typical strong nonlinear timevarying system,so it is difficult to set up a mathematic model and solve the analytical solution.In this paper a power supply model for magnetron sputtering is set up by using Simulink,the output current waveforms of simulation power supply model are researched working in different condition.It proves that the simulation method is useful for designing power supply,which is worthy spreading and applying. |
| Keywords: | magnetron sputtering power supply PWM simulation |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ | |