BaTiO_3压电薄膜的制备及其性能研究

利用旋涂技术,在聚二甲基硅氧烷(PDMS)混合液中掺入不同质量分数(30%,50%,70%)的钛酸钡(BaTiO_3)纳米颗粒,并将混合物均匀涂在洁净的硅片表面进行旋涂处理;加热固化制得压电薄膜,并对压电薄膜进行极化处理,分别运用扫描电子显微镜(SEM),X线衍射(XRD)仪分析薄膜表面和BaTiO_3粉末。实验结果表明,薄膜内部BaTiO_3分布相对均匀,且其中BaTiO_3纳米颗粒为四方相。设计振动能量采集测试系统测试分析薄膜的输出开路电压和供电能力,分别用单悬臂梁振动和激振器敲击的形式对压电薄膜的输出特性进行研究。压电薄膜的输出电压峰-峰值与BaTiO_3的质量分数具有高度的一致性,在w(BaTiO_3)=70%时,输出电压最高,对应的峰-峰值为3.50V。

Preparation and Properties of BaTiO3 Piezoelectric Thin Films

The piezoelectric film was prepared through adding the different mass fractions(30%, 50%, and 70%) of BaTiO3 nanoparticles into PDMS mixture solution, uniformly coating the mixture on the surface of the clean silicon wafer for spin coating treatment, and heat curing by using the spin coating technique. The polarization treatment of the piezoelectric film was carried out. The surface of the film and BaTiO3 powder were analyzed by SEM and XRD. The experimental results showed that the BaTiO3 distribution was relatively uniform in the film, and the BaTiO3 nanoparticle was the tetragonal phase. An vibration energy harvesting test system were designed to test and analyze the output open circuit voltage and power supply capacity of the piezoelectric film, the output characteristics of piezoelectric films were studied by single cantilever vibration and exciter knocking. The peak to peak value of the output voltage of the piezoelectric thin film was highly consistent with the specific gravity of BaTiO3. When the specific gravity was 70%, the output voltage was the highest, and the corresponding peak to peak values was 3.50 V respectively.