Fabrication of sub-micron high aspect ratio diamond structures with nanoimprint lithography |
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Authors: | M. Karlsson I. Vartianen F. Nikolajeff |
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Affiliation: | a Department of Engineering Science, Uppsala University, PO Box 534, SE-751 21, Sweden b Department of Physics and Mathematics, University of Joensuu, PO Box 111, FIN-80101, Finland |
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Abstract: | Polycrystalline diamond with optical quality has been patterned using nanoimprint lithography. Nanoimprint lithography is a rather new method for fabrication of resist structures with features sizes down to at least 20 nm. The pattern used in this article is a grating with a period of 600 nm and a fill factor of 0.5. Using plasma etching the nanoimprinted grating is etched into a freestanding diamond substrate. We have accomplished the fabrication of 300 nm diamond features with a depth of about 2 μm, which corresponds to an aspect ratio of 7. |
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Keywords: | CVD diamond Nanoimprint lithography Inductively coupled plasma etching Nanostructures |
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