基于弹性膜片的薄膜溅射式拉力传感器研究

介绍了一种基于弹性膜片结构的拉力传感器，敏感元件薄膜电阻应变栅采用离子束溅射、光刻技术与弹性体结合成一体。文中给出了传感器的基本结构及零点补偿和信号转接电路，介绍了薄膜电桥的制备过程，并对弹性体进行了仿真与分析。实验结果显示，该传感器在满量程范围内能满足设计要求，其额定载荷为850 N，灵敏度优于0.01377 mV/N。且其安全过载系数约为6.62，为同类拉力传感器的2~3倍。对传感器的标定表明，该传感器的综合误差不大于额定输出的0.013%。

The Research of Sputtering Thin-Film Tension Sensor Based on Elastic Diaphragm

A tension sensor based on an elastic diaphragm is introduced. The sensitive element is thin film resistive of strain gate,which is combined into one body with elastomer by using technique of ion beam sputtering and photo?lithography. The basic structure of the sensor and the circuit of zero compensation and signal switching is intro?duced in this paper. The simulation and analysis of the elastomer is also carried out. The experimental results show that the sensor can meet the design requirements in full scale. The load of the sensor is 850 N. The sensitivity is bet?ter than 0.013 77 mV/N. The safety overload coefficient is about 6.62,which is 2-3 times that of similar tension sen?sor. The calibration of the sensor indicates that comprehensive error of the sensor is not greater than 0.013%of the rated output.