| 超薄放射源和沉积膜厚度的测量比对 |
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| 引用本文： | 杜鸿善 梁东麒. 超薄放射源和沉积膜厚度的测量比对[J]. 原子能科学技术, 1990, 24(4): 37-41 |
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| 作者姓名： | 杜鸿善 梁东麒 |
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| 作者单位： | 中国原子能科学研究院 北京(杜鸿善，梁东麒，王豫生，郭春生)，中国原子能科学研究院 北京(李俊兰) |
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| 摘 要： | 在SF-3型石英微量天平监测下制备的超薄放射源和沉积膜,分别采用称重法、电子谱线分析法和背散射法对其厚度进行了比对测量,测量结果一致性较好,并与SF-3型石英微量天平给出的值相符。从而在实验上证明了SF-3型石英微量天平是可靠的。
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| 关 键 词： | 超薄型 放射源 沉积膜 测量 比对 |
INTERCOMPARISON OF MEASUREMENTS FOR THE THICKNESS OF ULTRA THIN SOURCES AND DEPOSITED FOILS |
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| DU HONGSHAN,LIANG DONGQI,WANG YUSHENG,GUO CHUNSHENG,LI JUNLAN China Institute of Atomic Energy,P. O. Box ,Beijing. INTERCOMPARISON OF MEASUREMENTS FOR THE THICKNESS OF ULTRA THIN SOURCES AND DEPOSITED FOILS[J]. Atomic Energy Science and Technology, 1990, 24(4): 37-41 |
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| Authors: | DU HONGSHAN LIANG DONGQI WANG YUSHENG GUO CHUNSHENG LI JUNLAN China Institute of Atomic Energy P. O. Box Beijing |
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| Affiliation: | DU HONGSHAN,LIANG DONGQI,WANG YUSHENG,GUO CHUNSHENG,LI JUNLAN China Institute of Atomic Energy,P. O. Box 275,Beijing |
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| Abstract: | Intercomparison of measurements for the thickness of ultra thin sources anddeposited foils prepared by vacuum evaporation method has been made by meansof the gravimetric, the electron spectrometric analysis and the backscatteringmethods respectively. The results agree with the values obtained with the quartz-crystal micro-balance of Model SF-3. It is proved then that quartz-crystalmicro-balance of Model SF-3 is a reliable tool for the thickness measurements ofultra thin sources and deposited foils prepared with the vacuum evaporationtechnique. |
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| Keywords: | Intercomparison of measurement Ultra thin source Deposited foil Quartz-crystal micro-balance |
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